Mu nganda zihuta cyane mu nganda, kubungabunga ibidukikije neza ni ngombwa mu bikorwa byo mu rwego rwo hejuru.Epitexy ya Molecular Beam (MBE), tekinike y'ingenzi mu guhimba semiconductor, yunguka cyane mu iterambere mu ikoranabuhanga ryo gukonjesha, cyane cyane binyuze mu gukoresha azote yuzuye kandiimiyoboro ya vacuum (VIP). Iyi blog iragaragaza uruhare rukomeye rwaVIPmu kuzamura MBEPorogaramu, ishimangira imikorere yayo kandi yizewe.
Akamaro ko gukonja muri MBE
Epitexy ya Molecular Beam (MBE)ni uburyo bugenzurwa cyane bwo kubitsa atome kuri substrate, ingenzi mukubyara ibikoresho bya semiconductor nka transistor, lazeri, hamwe nizuba. Kugirango ugere ku busobanuro buhanitse busabwa muri MBE, gukomeza ubushyuhe buke ni ngombwa. Amazi ya azote akoreshwa kenshi kubwiyi ntego bitewe nubushyuhe buke bwa dogere -196 ° C, bigatuma insimburangingo ziguma ku bushyuhe bukenewe mugihe cyo kubitsa.
Uruhare rwa Azote ya Liquid muri MBE
Amazi ya azote ni ntangarugero mubikorwa bya MBE, atanga uburyo buhoraho bwo gukonjesha butuma ibyuka bibaho nta guhindagurika k'ubushyuhe udashaka. Uku gushikama ningirakamaro mugukora ibikoresho byujuje ubuziranenge bwa semiconductor, kuko nubushyuhe buke butandukanye bushobora gutera inenge cyangwa kudahuza murwego rwa atome. Gukoresha azote yuzuye bifasha kugera kumiterere ya ultra-high vacuum isabwa kuri MBE, kwirinda kwanduza no kwemeza neza ibikoresho.
Ibyiza by'imiyoboro ya Vacuum (VIP) muri MBE
Imiyoboro ya Vacuum ikingiwe (VIP)ni intambwe mu gutwara neza azote yuzuye. Iyi miyoboro yakozwe hamwe na vacuum hagati yinkuta ebyiri, bigabanya cyane ihererekanyabubasha no gukomeza ubushyuhe bwa kirogenike ya azote yuzuye kuko igenda iva mububiko ikagera kuri sisitemu ya MBE. Igishushanyo kigabanya igihombo cya azote yuzuye bitewe no guhumeka, bigatuma itangwa rihamye kandi ryizewe kubikoresho bya MBE.
Gukora neza hamwe nigiciro-cyiza
GukoreshaVIPinPorogaramu MBEitanga ibyiza byinshi. Kugabanuka k'ubushyuhe bivuze ko hakenewe azote nkeya, kugabanya ibiciro byo gukora no kongera imikorere. Byongeye kandi, imiterere yimikorere yaVIPGira uruhare mubikorwa bikora neza mugabanye ingaruka ziterwa nubukonje nibindi byago bijyanye no gukoresha ibikoresho bya kirogene.
Kunoza inzira ihamye
VIPiremeza ko azote yuzuye iguma ku bushyuhe buhoraho murugendo rwayo kuriSisitemu ya MBE. Uku gushikama nibyingenzi mugukomeza ibintu bikomeye bikenewe mubikorwa byogukora neza. Mu gukumira ihindagurika ry'ubushyuhe,VIPifasha kubyara byinshi kandi bidafite ubusembwa bwa semiconductor ibice, kuzamura ubwiza rusange nibikorwa byibicuruzwa byanyuma.
HL Cryogenic ibikoresho: Kuyobora inzira hamwe na sisitemu yo kuzenguruka ya azote igezweho
HL Cryogenic Equipment Co., Ltd yateje imbere kandi ikora ubushakashatsi bugezwehoSisitemu yo Kuzenguruka Azoteibyo bitangirira kubigega bikabikwa bikarangirana nibikoresho bya MBE. Sisitemu imenya imikorere yubwikorezi bwa azote, gusohora umwanda, kugabanya umuvuduko & amabwiriza, gusohora azote, no gutunganya. Inzira yose ikurikiranwa na sensororo ya cryogenic kandi igenzurwa na PLC, igafasha guhinduranya hagati yuburyo bwimikorere nintoki.
Kugeza ubu, iyi sisitemu ikora neza ibikoresho bya MBE biva mubakora inganda nka DCA, RIBER, na FERMI. Kwinjiza kwaHL Ibikoresho bya Cryogenic'Sisitemu yateye imbere itanga itangwa ryizewe kandi ryiza rya azote yuzuye, irusheho kuzamura imikorere no gutuza kwa MBE.
Umwanzuro
Mu nganda ziciriritse, cyane cyane muri Porogaramu MBE, ikoreshwa rya azote yuzuye kandiimiyoboro ya vacuum (VIP)ni ngombwa.VIPntabwo byongera imikorere gusa nigiciro-cyiza cya sisitemu yo gukonjesha ahubwo inashimangira ituze nukuri bisabwa kugirango ibihimbano byujuje ubuziranenge. Nkuko icyifuzo cyibikoresho bigezweho bya semiconductor bikomeje kwiyongera, udushya muriVIPtekinoroji hamwe na sisitemu yateye imbere nkizakozwe naHL Ibikoresho bya CryogenicBizagira uruhare runini muguhuza inganda zikomeye zisabwa no guteza imbere ejo hazaza.
Mugukoresha inyungu zaVIPnaHL Ibikoresho bya Cryogenic'subuhangaSisitemu yo Kuzenguruka Azote, abakora semiconductor barashobora kugera kumurongo mwinshi, gukora neza, numutekano mubikorwa byabo MBE, amaherezo bakagira uruhare mugutezimbere ibikoresho bya elegitoroniki bizakurikiraho.
Igihe cyo kohereza: Jun-15-2024
