Sisitemu yo gukonjesha ikonje ya azori zikoreshwa cyane muri semiconductor & chip inganda, harimo inzira ya,
- Ikoranabuhanga rya Molecular Beam Epitaxy (MB)
- Ikizamini cya Chip nyuma ya cob
Ibicuruzwa bijyanye
Vacuum yuzuye urukurikirane
Vacuum yerekeje ahantu hahanamye
Dynamic Vacuum sisitemu
Vacuum yiteguye icyiciro gitandukanya urukurikirane
Vacuum yuzuye valve
Gutanga ibikoresho bya sisitemu yo gushyigikira
MoleCur Beam Epitaxy
Ikoranabuhanga rya Molecular Beam Epitaxy (MB) yateguwe muri 1950 kugirango bategure ibikoresho bya filime ya filime bar more ya firime ukoresheje tekinoroji ya vacuum. Hamwe n'iterambere ry'ikoranabuhanga rya varuum, ikoreshwa ry'ikoranabuhanga ryageze ku murima wa siyanse ya Semiconductor.
HL yabonye icyifuzo cya Mbe Amashanyarazi ya azote, yateguye tekinike yateguwe neza kuri sisitemu idasanzwe ya tekinoroji ya tekinoroji yikoranabuhanga, yakoreshejwe mubigo byinshi, bya kaminuza nubushakashatsi .
Ibibazo bisanzwe bya Semiconductor & Chip Inganda zirimo,
- Igitutu cya azote ya azote muri terminal (MB) ibikoresho. Irinde igitutu kirenze kwibikoresho byangiza (MB).
- Crurgenic nyinshi zisukura inlet na outlet
- Ubushyuhe bwa azote ya azote mubikoresho bya terefone
- Umubare wuzuye wa litugenic equasions
- (Automatic) Guhindura imirongo nyamukuru nashami
- Guhindura igitutu (kugabanya) no gutuza kwa VIP
- Gusukura umwanda ushoboka hamwe nibisigisigi byafunzwe kuva tank
- Kuzuza igihe cyibikoresho byamazi
- Umuyoboro
- Kurwanya amazi muri sisitemu ya VI
- Kugenzura gutakaza azote amazi mugihe cya serivisi zidahagarara za sisitemu
Urubura rwa HL rwatanzwe (VIP) rwubatswe kuri ASME B31.3 Kode yo guteganya igitutu nkikigereranyo. Ubuhanga bwubwubatsi nubushobozi bwo kugenzura ubuziranenge bwo kwemeza imikorere no gukora neza kwigiti cyabakiriya.
Ibisubizo
HL Zogenic Ibikoresho bitanga abakiriya sisitemu ya vacuum yashinyitse kugirango yuzuze ibisabwa nibisabwa byinganda za semiconductor & chip:
1.Imicungire yimizitiro ya 1. ASME B31.3 Kode yo guteganya igitutu.
2.Icyiciro cyihariye gitandukanya na curgenic nyinshi zinyenzi hamwe nijwi ryibikorwa byikora bihurira nibisabwa byuzuye
3. Igishushanyo mbonera kandi gikwiye cyemeza ko ibikoresho bya terefone buri gihe bikora mumitutu yateguwe.
4.Abanzizi-amazi ya gaze ashyirwa mumuyoboro wa VI urangije VI Pipeline. Inzitizi ya gaze ikoresha ihame rya gaze kugirango ihagarike ubushyuhe kuva kumpera yumuyoboro wa VI
5.Vi kugenzurwa na Vacuum yuzuye valve (viv): harimo na vacuum yafunze valve, vacuum yagenzuwe valve, ubwoko butandukanye bwa viv burashobora kugarura valve hamwe no kunyereza umwuga uhuza VIP nkuko bisabwa. Viv ihuriweho na VIP mbere yuruganda, nta kuvura urubuga. Igice cya Viv kirashobora gusimburwa byoroshye. .
Kugerwaho, niba hari ibisabwa byinyongera kugirango ubone ubwitonzi bwimbere. Birasabwa ko abakiriya bahitamo Ba cyangwa EP Amashanyarazi ya SOP nka VIP Imbere kugirango bagabanye spillage idafite ibyuma.
7.Vacuum yakiriwe neza: isukura umwanda ushoboka hamwe nibisigisigi byafunzwe kuva tank.
.Nyuma yiminsi mike cyangwa arenga cyangwa kubungabunga, birakenewe cyane kuba ibikoresho bya VI Imikorere yambere igomba gusuzumwa muburyo. Itanga uburinzi bwiza kubikoresho bya nyuma nibikoresho byo gushyigikira vipi yinkunga nka valves.
9.Ubiciro byombi bifite imbaraga na static vacuum byatanzwe (byoroshye).
. ). Uburebure bwa VI imwe ya VI ishobora guhiga burashobora gutangwa hakurikijwe ibyo umukoresha asabwa.
Ubwoko butandukanye bwo guhuza: Vacuum Bayonet Ihuza (VBC) Ubwoko no Guhuza Isukuye birashobora gutoranywa. Ubwoko bwa VBC ntibikeneye kuvurwa kurubuga.
