Sisitemu yo gukonjesha azote ikoreshwa cyane mubikorwa bya semiconductor & chip inganda, harimo inzira ya,
- Ubuhanga bwa Molecular Beam Epitaxy (MBE)
- Ikizamini cya chip nyuma ya pack ya COB
Ibicuruzwa bifitanye isano
Umuyoboro wa Vacuum
Vacuum Yashizwemo Urutonde rworoshye
Sisitemu ya Vacuum Pump Sisitemu
Icyiciro Cyitandukanya Icyiciro
Urukurikirane rwa Vacuum
Ibikoresho byo gushyigikira sisitemu
MOLECULAR BEAM EPITAXY
Tekinoroji ya Molecular Beam Epitaxy (MBE) yakozwe mu myaka ya za 1950 kugirango itegure ibikoresho bya firime ya semiconductor yoroheje hifashishijwe ikoranabuhanga rya vacuum. Hamwe niterambere rya tekinoroji ya ultra-high vacuum, ikoreshwa ryikoranabuhanga ryaguwe mubijyanye na siyanse ya semiconductor.
HL yabonye icyifuzo cya sisitemu yo gukonjesha ya azote ya MBE, yateguye umugongo wa tekiniki kugirango iteze imbere uburyo bwihariye bwa MBE y’amazi ya azote yo gukonjesha ikoranabuhanga rya MBE hamwe n’urwego rwuzuye rwa sisitemu ya vacuum izengurutswe, yakoreshejwe mu bigo byinshi, kaminuza ndetse n’ibigo by’ubushakashatsi. .
Ibibazo bisanzwe bya semiconductor & chip inganda zirimo,
- Umuvuduko wa Azote ya Liquid mubikoresho bya Terminal (MBE). Irinde umuvuduko ukabije wibikoresho byangiza (MBE).
- Inshuro nyinshi za Cryogenic Liquid Inlet na Outlet Igenzura
- Ubushyuhe bwa Azote ya Liquid mubikoresho bya Terminal
- Umubare ufatika w’ibyuka bihumanya ikirere
- (Automatic) Guhindura imirongo nyamukuru nishami
- Guhindura igitutu (Kugabanya) no guhagarara kwa VIP
- Isuku Hanze Ibishoboka Ibisigara hamwe nibisigara bya ice biva muri Tank
- Kuzuza Igihe cyibikoresho byamazi
- Imiyoboro ibanziriza
- Kurwanya Amazi muri Sisitemu ya VIP
- Kugenzura Gutakaza Amazi ya Azote mugihe cya serivisi idahagarara ya sisitemu
Umuyoboro wa Vacuum HL (VIP) wubatswe kuri ASME B31.3 Kode ya Piping kode nkibisanzwe. Uburambe bwubuhanga hamwe nubushobozi bwo kugenzura ubuziranenge kugirango hamenyekane neza nigiciro-cyiza cyuruganda rwabakiriya.
UMUTI
Ibikoresho bya HL Cryogenic biha abakiriya sisitemu ya Vacuum Insulated Piping Sisitemu kugirango yuzuze ibisabwa nibisabwa na semiconductor & chip inganda:
1.Uburyo bwiza bwo gucunga neza: ASME B31.3 Kode y'ingutu.
2.Icyiciro cyihariye gitandukanya hamwe na Multi Cryogenic Liquid Inlet na Outlet ifite imikorere yo kugenzura byikora byujuje ibyangombwa bisohoka mu kirere, azote ikoreshwa neza hamwe nubushyuhe bwa azote yuzuye.
3.Ibishushanyo bihagije kandi ku gihe byerekana ko ibikoresho bya terefone buri gihe bikora mubiciro byateganijwe.
4.Inzitizi ya gaz-yamazi ishyirwa mumuyoboro uhagaze wa VI kumpera ya VI. Barrière-gazi ya Barrière ikoresha ihame rya kashe ya gaze kugirango ihagarike ubushyuhe kuva kumpera ya umuyoboro wa VI winjira mu miyoboro ya VI, kandi bigabanya neza igihombo cya azote yuzuye mugihe cya serivisi idahagarara kandi rimwe na rimwe.
5.VI Imiyoboro Igenzurwa na Vacuum Yashizwe Kumurongo (VIV): Harimo Vacuum Yashizwemo (Pneumatike) Gufunga Valve, Vacuum Yagenzuwe na Valve, Vacuum Yagenzuwe na Valve nibindi. Ubwoko butandukanye bwa VIV burashobora guhinduka muburyo bwo kugenzura VIP nkuko bisabwa. VIV ihujwe na VIP prefabrication mubakora, nta kuvura kurubuga. Igice cya kashe ya VIV gishobora gusimburwa byoroshye. .
6.Isuku, niba hari ibisabwa byongeweho kugirango isuku yimbere yimbere. Birasabwa ko abakiriya bahitamo imiyoboro ya BA cyangwa EP idafite ibyuma nka VIP y'imbere imbere kugirango barusheho kugabanya ibyuma bitagira umwanda.
7.Vacuum Yashizwemo Akayunguruzo: Kuraho umwanda ushobora kuba hamwe n'ibisigara bya barafu biva muri tank.
8.Nyuma yiminsi mike cyangwa igihe kinini cyo guhagarika cyangwa kubungabunga, birakenewe cyane kubanziriza ibikoresho bya VI Piping nibikoresho bya terefone mbere yuko amazi ya kirogenike yinjira, kugirango wirinde icyuya cya barafu nyuma y’amazi ya kirogenike yinjira mu buryo butaziguye ibikoresho bya VI hamwe n’ibikoresho bya terefone. Imikorere ya precooling igomba kwitabwaho mugushushanya. Itanga uburinzi bwiza kubikoresho bya terefone nibikoresho bya VI Piping ibikoresho nkibikoresho.
9.Kwambara kuri Dynamic na Static Vacuum Yashizwemo (Flexible) Sisitemu yo kuvoma.
10.Dinamic Vacuum Yashizwemo (Flexible) Sisitemu yo kuvoma: Igizwe na VI Flexible Hoses na / cyangwa VI Umuyoboro, Jumper Hoses, Vacuum Insulated Valve Sisitemu, Phase Separators na Dynamic Vacuum Pump Sisitemu (harimo pompe vacuum, valve solenoid na gipima ya vacuum nibindi. ). Uburebure bwa VI Flexible Hose irashobora guhindurwa ukurikije ibyo umukoresha asabwa.
11.Uburyo butandukanye bwo guhuza: Ubwoko bwa Vacuum Bayonet (VBC) Ubwoko na Welded Connection irashobora gutoranywa. Ubwoko bwa VBC ntibukeneye kuvurwa kurubuga.
