Incamake ya Molecular Beam Epitaxy (MBE)
Tekinoroji ya Molecular Beam Epitaxy (MBE) yakozwe mu myaka ya za 1950 kugirango itegure ibikoresho bya firime ya semiconductor yoroheje hifashishijwe ikoranabuhanga rya vacuum.Hamwe niterambere rya tekinoroji ya ultra-high vacuum, ikoreshwa ryikoranabuhanga ryaguwe mubijyanye na siyanse ya semiconductor.
Impamvu yibikoresho bya semiconductor ubushakashatsi nibisabwa kubikoresho bishya, bishobora kunoza imikorere ya sisitemu.Na none, tekinoroji nshya yibikoresho irashobora kubyara ibikoresho bishya nubuhanga bushya.Molecular beam epitaxy (MBE) nubuhanga buhanitse bwo gukura kwa epitaxial layer (ubusanzwe semiconductor).Ikoresha ubushyuhe bwumuriro wa atome cyangwa molekile bigira ingaruka kuri kristu imwe.Ikiranga ultra-high vacuum iranga inzira ituma ahantu hamwe no gukura kw'ibikoresho bikingira hejuru ya semiconductor nshya imaze gukura, bikavamo imiyoboro idafite umwanda.
Ikoranabuhanga rya MBE
Epitaxy ya molekulari yamashanyarazi yakorewe mu cyuho kinini cyangwa icyuho kinini cyane (1 x 10-8Pa) ibidukikije.Ikintu cyingenzi cyingenzi cya epitaxy ya molekulari nigipimo cyayo cyo hasi cyane, ubusanzwe ituma firime ikura epitaxial ikura kumuvuduko uri munsi ya 3000 nm kumasaha.Igipimo gito cyo kubitsa gisaba icyuho gihagije kugirango ugere kurwego rumwe rwisuku nkubundi buryo bwo kubitsa.
Kugirango uhure na vacuum ya ultra-high yasobanuwe haruguru, igikoresho cya MBE cell selire ya Knudsen） gifite urwego rukonje, kandi ibidukikije byangiza cyane byumba byikura bigomba kubungabungwa hakoreshejwe uburyo bwo kuzenguruka azote.Amazi ya azote akonjesha ubushyuhe bwimbere bwibikoresho kugeza kuri Kelvin 77 (−196 ° C).Ubushyuhe buke burashobora kurushaho kugabanya ibirimo umwanda muri vacuum kandi bigatanga uburyo bwiza bwo gushira firime zoroshye.Kubwibyo, sisitemu yihariye yo gukonjesha azote ikenewe kugirango ibikoresho bya MBE bitange itangwa rihoraho kandi rihoraho rya -196 ° C ya azote.
Sisitemu yo gukwirakwiza azote ya azote
Vacuum yamazi ya azote ikonjesha sisitemu ikubiyemo cyane cyane,
Tank ikirunga
● nyamukuru nishami vacuum jacketed pipe / vacuum jacketed hose
● MBE idasanzwe itandukanya na vacuum jacketed umuyoboro
● vacuum zitandukanye
Inzitizi ya gaze-amazi
● vacuum jacketed filter
Sisitemu ya vacuum pompe sisitemu
Sisitemu yo gushiramo no guhanagura sisitemu yo gushyushya
Isosiyete ikora ibikoresho bya HL Cryogenic yabonye icyifuzo cya sisitemu yo gukonjesha ya azote ya MBE, yateguye umugongo wa tekiniki kugirango iteze imbere uburyo bwihariye bwa MBE bwamazi ya azote yo gukonjesha ikoranabuhanga rya MBE hamwe na insuline yuzuye ya vacuumedsisitemu yo kuvoma, yakoreshejwe mu nganda nyinshi, kaminuza n'ibigo by'ubushakashatsi.
HL Ibikoresho bya Cryogenic
Ibikoresho bya HL Cryogenic byashinzwe mu 1992 ni ikirango gishamikiye kuri Chengdu Holy Cryogenic ibikoresho mu Bushinwa.Ibikoresho bya HL Cryogenic byiyemeje gushushanya no gukora sisitemu yo hejuru ya Vacuum Yanduye ya Cryogenic Piping hamwe nibikoresho bifitanye isano.
Kubindi bisobanuro, nyamuneka sura urubuga rwemewewww.hlcryo.com, cyangwa imeri kuriinfo@cdholy.com.
Igihe cyo kohereza: Gicurasi-06-2021