Mu nganda zikora ibikoresho bya semiconductor, sisitemu zo gukwirakwiza ibintu bitagira amazi (cryogenic distribution systems) zitezweho gukora ibirenze kwimura azote cyangwa argon y’amazi kuva ku gice kimwe ujya ku kindi. Amazi agomba kuguma ahamye, asukuye, kandi akaba mu gice kimwe kugeza aho akoreshwa. Ndetse n’ingano nto y’ubushyuhe ishobora gutera imyuka idasanzwe, ihindagurika ry’umuvuduko w’amashanyarazi, cyangwa kwanduzwa n’ubushuhe bigira ingaruka ku kudahinduka kw’imikorere.

Niyo mpamvuUmuyoboro urinda ubushyuhe mu cyumasisitemu zikunze gukoreshwa mu byuma bikoresha ibyuma bya semiconductor aho gukoresha imiyoboro isanzwe ikoreshwa mu gufunga ifuro. Iyo ihujwe n'ibikoresho bicungwa nezaSisitemu yo gupompa ikoresha umwuka ushyushye, ubushyuhe bwose bushobora kuguma munsi ya 3 W/m mu gihe bugumana ubudahangarwa bw'igihe kirekire mu murongo wose wo kohereza.

Ku bijyanye n'ikoreshwa rya semiconductor, insulation ya vacuum ntigomba gufatwa nk'urwego rudakora rukikije umuyoboro. Ni sisitemu y'ubushyuhe ikora isaba imikorere ipimwa ya vacuum no kugumana ubuziranenge igihe kirekire. Mu nyubako zikora chips nziza cyane, ndetse no kwiyongera gato k'ubushyuhe bw'amazi bishobora gutuma habaho imiterere y'amazi mu byiciro bibiri ibangamira insinga zo gukonjesha, sisitemu zo gusukura, cyangwa ibikoresho byo kugenzura imikorere.

Impamvu gushyuha kw'ubushyuhe ari ingenzi muri sisitemu za Cryogenic Semiconductor

Buri murongo w’ihererekanya ry’ubushyuhe uterwa n’uburyo butatu bw’ibanze bwo kwimura ubushyuhe:

• imirasire mu mwanya wose
• gusohora imyuka biterwa n'ibisigazwa bya molekile
• kuyobora kw'ibintu mu buryo buhamye binyuze mu nkunga n'ibice bigabanya uburebure

Mu buryo bwateguwe nezaUmuyoboro urinda ubushyuhe mu cyuma, igitutu cy’umwuka usanzwe kigabanuka munsi ya 1 × 10⁻⁴ Pa. Kuri urwo rwego rw’umwuka uvamo umwuka, molekile za gaze zisigaye zifite inzira y’ubugari bunini cyane ugereranyije n’icyuho cy’umwuka uvamo umwuka, ibyo bigabanya cyane uburyo ubushyuhe buturuka ku mwuka butwara.

Gutwara ubushyuhe hakoreshejwe imirasire bigenzurwa hakoreshejwe uburyo bwo gukingira imirasire (MLI). Ubwo buryo bwo gukingira bugizwe n'uburyo bwo gusimburanya imiterere y'icyuma gishyushya n'ibikoresho byo mu bwoko bwa "low-conductivity spacer material". Hamwe n'uburyo bukwiye bwo gushyiraho ubucucike bw'icyuma n'uburyo bwo kugishyiraho, ubushyuhe bushyuha bushobora kugabanuka kugeza kuri wati nke kuri metero kare.

Inzira isigaye y'ubushyuhe ikomoka ahanini ku byuma bishyigikira ikoranabuhanga. Kugira ngo bigabanye iyi ngaruka, ibikoresho bikoresha ikoranabuhanga riciriritse nka G-10 fiberglass cyangwa Torlon® bikunze gukoreshwa. Ibi byuma bishyigikira ikoranabuhanga biracyakeneye imbaraga zihagije za ikoranabuhanga kugira ngo byihanganire guhindagurika kw'ubushyuhe, kunyeganyega, no gutwarwa n'imitingito mu gihe cy'ikoreshwa.

Mu gihe cy'intera ndende, itandukaniro riri hagati yo gukingira umwuka n'ingufu z'ifuro rigaragara cyane. Sisitemu yo gukingira umwuka ibungabunzwe neza ishobora kugumana ubushyuhe buhamye imyaka myinshi, mu gihe gukingira umwuka w'ifuro bigenda byinjiza ubushuhe mu kirere buhoro buhoro. Iyo ubushuhe bwinjiye mu buryo bwo gukingira umwuka bugakonja, ubushyuhe bukunze kugabanuka uko igihe kigenda gihita.

Mu buryo bufatika bwo gukwirakwiza LN₂ muri semiconductor,imiyoboro ikoreshwa mu byuma bifungabishobora kugabanya cyane ingaruka z'amazi ugereranije n'imirongo gakondo ikoreshwa mu gufunga ifuro, cyane cyane iyo ugiye hanze igihe kirekire cyangwa uhora ukora ku mutwe w'ingenzi.

Sisitemu yo gupompa ikoresha umwuka ushyushye

Ikibazo kimwe ku makoti ya vacuum conditioner ni uko ireme rya vacuum conditioner rishobora kugenda rigabanuka buhoro buhoro uko imyaka igenda ihita bitewe n’imyuka isohoka, helium ikwirakwira, cyangwa amazi aturuka muri microscope.

Kugira ngo tubikemure, uburebure buniniUmuyoboro urinda ubushyuhe mu cyumasisitemu zishobora gushyirwaho ibikoreshoSisitemu yo gupompa ikoresha umwuka ushyushyeUbusanzwe iyi sisitemu ikubiyemo uburyo bwo gushyiramo turbomolecular cyangwa skrola pump butuma buri gihe ibyuka bivamo umwuka bisubira uko byari bimeze mbere.

Ingano y'umwuka uva mu cyuma ikurikiranwa buri gihe hakoreshejwe uburyo bwo gupima bukonje. Pompe ikora gusa iyo umuvuduko w'amashanyarazi urenze aho wagenewe, bityo ingufu zikoreshwa n'ibisabwa mu kubungabunga biguma biri hasi cyane.

Mu mushinga umwe wo kuvugurura inyubako za semiconductor i Hsinchu, muri Tayiwani, sisitemu yo gupompa ikoresheje vacuum yakozwe neza yemereye umutwe w’imashini ishaje ya LN₂ kongera gukora neza nk’uko yari imeze mbere idafunze umurongo w’imashini. Ku mishinga mishya, kubungabunga vacuum bitanga icyizere cy’uko insinga zigumana ubushyuhe igihe kirekire mu gihe cyose cy’akazi kayo.

Ibikoresho n'igishushanyo mbonera cya sisitemu

Ku bijyanye n'uburyo bwo gukoresha semiconductor na ultra-high-purity, umuyoboro w'imbere ukorwa mu byuma bita 304L cyangwa 316L bita steel stainless. Ubuso bw'imbere burasukurwa, bugasukurwa, kandi bugashyirwa mu buryo bunyuranyije n'amategeko kugira ngo buhuze n'ibisabwa mu gusukura ogisijeni no kugabanya ibyago byo kwandura.

Ikoti ryo hanze rishobora gukoresha icyuma cya karuboni gisize irangi cyangwa icyuma kitagira umugese bitewe n'aho gishyirwa. Mu bice byegeranye n'icyumba cy'isuku, amakoti yo hanze atagira umugese akunze kuba meza kugira ngo hirindwe ingese cyangwa kwanduzwa n'ubuso.

Ubushyuhe bugomba kandi kwitabwaho neza. Umurongo wo kohereza LN₂ ushobora gucika hagati ya mm 2.5–3 kuri metero hagati y’ubushyuhe bw’ikirere n’ubushyuhe bw’imikorere. Kugira ngo winjire muri ubu buryo, utumashini two kwagura ubushyuhe dukunze gushyirwa ahantu hagenwe hose mu miyoboro y’amazi.

Aho bikenewe ko umuntu agenda cyangwa akagira ubworoherane,Umuyoboro w'amazi ushyushye ukoresha amashanyaraziAhantu hakunze gukoreshwa ibyuma bihuza ibigega, ibikoresho bihuza, amashami menshi, n'ibikoresho byo mu bwoko bwa "mobile process skids".

Izi myobo zoroshye zikoresha igice cy'imbere gifite ikoti ry'ubushyuhe hamwe n'icyuma gifunga ubushyuhe n'imiterere ya MLI bisa n'umuyoboro ufunga ubushyuhe ukomeye. Ibyumvikanyweho neza bishobora kugumana ubuziranenge bw'ubushyuhe nyuma yo guhindagurika kenshi kw'ubushyuhe mu gihe binarinda ko urubura rwo hanze rubaho ku myobo idafunga ubushyuhe.

Valves zirinda ubushyuhe mu cyumanaIbitandukanya Icyiciro

Gucunga ubushyuhe buva ntibigarukira gusa ku bice by'imiyoboro igororotse. Amavaluve naibitandukanya ibicekandi bigira uruhare runini mu kubungabunga imiterere y’amazi aturuka ku kirere adahindagurika.

A Valve ikingira umwukaubusanzwe ikoresha agakoresho kanini n'agapira gapfundikiye kugira ngo irinde ahantu hakomeye ho gufunga ahantu hakonje cyane. Ibi bifasha kwirinda gukonjesha hafi y'aho ibiti bipakira kandi bikagabanya ubushyuhe butifuzwa imbere mu nyubako y'agapira.

Hatabayeho ubushyuhe bwinshi buva mu cyuma, valve zishobora guhinduka ahantu hashyuha cyane muri sisitemu. Mu bijyanye no gutanga amazi ashyushye, ibi bishobora gutuma habaho imifuka y’umwuka ihindagurika, imiterere y’amazi idahindagurika, cyangwa se hakagira ingaruka ku mazi.

Ku bijyanye na sisitemu zo gutunganya ibikoresho bya semiconductor, valves za extended-bonnet globe na valves za top-entry ball zikoreshwa cyane hakurikijwe ibisabwa na ASME B31.3 na EN 13480.

A Igitandukanya cy'imashini ikoresha amashanyaraziikoreshwa mu gukuraho imyuka ishyushye mbere yuko amazi yinjira mu bikoresho byo hasi byoroheje. Mu bikorwa bya semiconductor, urujya n'uruza rw'ibice bibiri rudahindagurika rushobora gutuma umuvuduko uhindagurika bihagije kugira ngo utere inzika cyangwa ifunga ry'ibikoresho.

Imiterere myinshi y’ibitandukanya ikoresha uburyo bwo kwinjiramo bukoresha tangential hamwe n’imiterere y’imbere y’ibigabanya ubushyuhe kugira ngo byongere imikorere myiza yo gutandukanya umwuka n’amazi. Mu mishinga myinshi, ibitandukanya bihuzwa na Mini Tank ishyirwa hafi y’aho ibintu bikorerwa. Mini Tank ikora nk'ingano y’ibigabanya ubushyuhe mu gace runaka, ifasha mu gutuza ihindagurika ry’ibikenewe mu gihe gito hatabayeho kongeramo ubushyuhe bwinshi.

Urugero rw'umushinga wa semiconductor

Umushinga wo kwagura inyubako za DRAM muri Koreya y'Epfo wasabye ko habaho umuyoboro mushya wo gukwirakwiza LN₂ utanga ibikoresho byo gupima bikonjeshwa mu mazi n'ibikoresho byo gutunganya wafer.

Ishyirwaho ryari rifite umuyoboro ukomeye ukingira ukoresheje umwuka uvamo uburebure bwa metero 180 uhujwe n'amashami menshi y'ibikoresho binyuze mu miyoboro ihindura imiterere y'umuyoboro uvamo ubwikorezi. Hashyizweho agace gatandukanya imiterere y'umuyoboro ukingira uvamo ubwikorezi n'ikigega gito cya metero 2 hafi y'aho ububiko bunini bushyirwa.

Sisitemu ya Dynamic Vacuum Pomp yagumanye umuvuduko wa annular uri munsi ya 5×10⁻⁶ mbar ku mirongo minini ya santimetero 6.

Mu gihe cyo gutangira gukoresha, ubushyuhe bwapimwe ku mutwe w’ibanze bwageraga kuri impuzandengo ya 1.3 W/m mu gihe cy’imikorere idahindagurika. Nyuma y’umwaka umwe wo gukora udasibangana, ingendo zo kugarura umwuka mu buryo bwa buri gihe zatumye imikorere y’ubushyuhe ikomeza kuba hafi y’uko byari bimeze mbere.

Ugereranyije n’igitekerezo cyakozwe mbere cyo gushyiramo ifuro, ikigo cyagaragaje ko igihombo cya azote y’amazi cyagabanutse cyane kandi ko imikorere yacyo yarushijeho kuba myiza. Inyandiko z’ibikorwa byakozwe nazo ntizagaragaje ubwandu buterwa n’ubushuhe buterwa no kwangirika kw’ubushyuhe.

Porogaramu

Sisitemu zo kohereza amazi zikoresha imashini zishyushya zikoreshwa cyane mu nganda zikora ibikoresho bya semiconductor, ibikorwa remezo bya LNG, gukwirakwiza gaze mu nganda, no gukoresha hydrogen y'amazi.

Nubwo imiterere y'imikorere itandukanye, intego y'ubuhanga iracyari imwe:

• komeza uburimbane bw'ibikoresho byo mu bwoko bwa "vacuum conditioner"
• gabanya ubushyuhe bwinjira
• kubungabunga ihinduka ry'icyiciro mu gihe cyose cyo kohereza

Igishushanyo mbonera cya sisitemu gisanzwe gikurikiza amahame mpuzamahanga nka ASME B31.3, EN 13480, na ISO 21029 bitewe n'aho umushinga ugeze n'ibisabwa mu karere.

Ku bikoresho bya semiconductor, imikorere ya sisitemu yo gukwirakwiza amazi igira ingaruka ku buryo butaziguye ku mikorere myiza, ikoreshwa ry'amazi, no kwizerwa mu mikorere igihe kirekire. Kubera iyo mpamvu, imiyoboro, valves, separators, na sisitemu zo kubungabunga umuyaga bigomba gutegurwa nk'uburyo bumwe buhuriweho bw'ubushyuhe aho kuba ibice byigenga.

At HL Cryogenics, dukorana n'abakora EPC, amasosiyete ya gazi, n'ibigo bya semiconductor kugira ngo duteze imbere ibisubizo byo kohereza ibikoresho bidafite ubushyuhe bishingiye ku miterere nyayo y'imikorere, intego z'umutwaro w'ubushyuhe, n'ibisabwa mu gushyiraho aho kuba imiterere isanzwe ya kataloge.

Niba uteganya umushinga mushya w’ibikoresho bya semiconductor cyangwa kuvugurura umuyoboro usanzwe wo gukwirakwiza LN₂, itsinda ryacu ry’abahanga rishobora kugufasha gusuzuma imikorere y’ubushyuhe buva, ingamba zo gusohora umwuka, n’imiterere ya sisitemu kugira ngo ikore igihe kirekire.