Umushinga Chip MBE warangiye mumyaka yashize

Ikoranabuhanga

Molecular beam epitaxy, cyangwa MBE, ni tekinike nshya yo gukura amafirime meza yo mu rwego rwo hejuru ya kristu kuri kristu.Mugihe cya ultra-high vacuum conditions, ukoresheje amashyiga ashyushye afite ibikoresho byose bisabwa kandi bikabyara amavuta, binyuze mumyobo yakozwe nyuma yo kwegeranya urumuri rwa atome cyangwa molekile, gutera inshinge zubushyuhe bukwiye bwa substrate imwe, kugenzura urumuri rwa molekile kugeza substrate yogusikana icyarimwe, irashobora gukora molekile cyangwa atome murwego rwo guhuza kristu kugirango ikore firime yoroheje kuri substrate "gukura".

Kugirango imikorere isanzwe yibikoresho bya MBE, isuku nyinshi, umuvuduko muke hamwe na azote isukuye cyane ya azote isabwa guhora kandi ijyanwa mucyumba gikonjesha ibikoresho.Muri rusange, ikigega gitanga azote yuzuye gifite umuvuduko usohoka hagati ya 0.3MPa na 0.8MPa. Azote yuzuye ya -196 ℃ ihinduka umwuka mubi muri azote mugihe cyo gutwara imiyoboro.Amazi azote namara gazi ya gazi ya 1: 700 imaze guhumeka mumazi, bizatwara umwanya munini wa azote yuzuye kandi bigabanye umuvuduko usanzwe kumpera yumuyoboro wa azote.Byongeye kandi, mu kigega cyo kubika azote yuzuye, hashobora kuba imyanda itarasukurwa.Mu miyoboro ya azote yuzuye, kubaho umwuka utose bizanatuma habaho urubura.Niba ibyo byanduye bisohotse mubikoresho, bizangiza ibyangiritse bitateganijwe.

Kubwibyo, azote yuzuye mumazi yo kubika hanze ijyanwa mubikoresho bya MBE mumahugurwa adafite ivumbi hamwe nubushobozi buhanitse, butajegajega kandi busukuye, hamwe numuvuduko muke, nta azote, nta mwanda, amasaha 24 ntahagarikwa, ubwo buryo bwo kugenzura ubwikorezi ni ibicuruzwa byujuje ibyangombwa.

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Guhuza ibikoresho bya MBE

Kuva mu 2005, ibikoresho bya HL Cryogenic (HL CRYO) byateje imbere kandi bitezimbere iyi sisitemu kandi bifatanya n’abakora ibikoresho mpuzamahanga bya MBE.Abakora ibikoresho bya MBE, barimo DCA, REBER, bafitanye umubano na sosiyete yacu.Abakora ibikoresho bya MBE, barimo DCA na REBER, bafatanije mumishinga myinshi.

Riber SA nisoko ryambere ritanga isoko ya molekulari beam epitaxy (MBE) hamwe na serivisi zijyanye nubushakashatsi bwa semiconductor hamwe nibikorwa byinganda.Igikoresho cya Riber MBE gishobora kubitsa ibintu bito cyane kuri substrate, hamwe nubugenzuzi buhanitse.Ibikoresho bya vacuum bya HL Cryogenic ibikoresho (HL CRYO) bifite ibikoresho bya Riber SA Ibikoresho binini ni Riber 6000 naho bito ni Compact 21. Bimeze neza kandi byamenyekanye nabakiriya.

DCA niyo oxyde yambere ku isi MBE.Kuva mu 1993, hashyizweho uburyo bunoze bwo gukoresha tekinike ya okiside, gushyushya antioxyde-substrate no gushyushya antioxydeant.Kubera iyo mpamvu, laboratoire nyinshi ziyoboye zahisemo tekinoroji ya DCA.Sisitemu ya semiconductor MBE ikoreshwa kwisi yose.Sisitemu yo gukwirakwiza azote ya VJ ya HL Cryogenic ibikoresho (HL CRYO) hamwe na MBE ibikoresho bya moderi nyinshi za DCA bifite uburambe buhuye mumishinga myinshi, nkicyitegererezo P600, R450, SGC800 nibindi.

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Imbonerahamwe y'imikorere

Ishuri Rikuru rya Tekinike rya Shanghai, Ishuri Rikuru ry'Ubushinwa
Ikigo cya 11 cy'Ubushinwa Ikoranabuhanga rya elegitoroniki
Ikigo cya Semiconductor, Ishuri Rikuru ry'Ubushinwa
Huawei
Alibaba DAMO Academy
Yamazaki Inc.
Yamazaki Inc.
Suzhou Everbright Photonics

Igihe cyo kohereza: Gicurasi-26-2021